000 04256nam a22005535i 4500
001 978-1-84800-021-6
003 DE-He213
005 20141014113457.0
007 cr nn 008mamaa
008 100301s2008 xxk| s |||| 0|eng d
020 _a9781848000216
_9978-1-84800-021-6
024 7 _a10.1007/978-1-84800-021-6
_2doi
041 _aeng
100 1 _aKiong, Tan Kok.
_eauthor.
245 1 0 _aPrecision Motion Control
_h[electronic resource] :
_bDesign and Implementation /
_cby Tan Kok Kiong, Lee Tong Heng, Huang Sunan.
250 _aSecond Edition.
260 1 _aLondon :
_bSpringer London,
_c2008.
264 1 _aLondon :
_bSpringer London,
_c2008.
300 _bonline resource.
336 _atext
_btxt
_2rdacontent
337 _acomputer
_bc
_2rdamedia
338 _aonline resource
_bcr
_2rdacarrier
347 _atext file
_bPDF
_2rda
490 1 _aAdvances in Industrial Control,
_x1430-9491
505 0 _aPrecision Tracking Motion Control -- Automatic Tuning of Control Parameters -- Co-ordinated Motion Control of Gantry Systems -- Geometrical Error Compensation -- Electronic Interpolation Errors -- Vibration Monitoring and Control -- Other Engineering Aspects.
520 _aApplications of precision engineering, generally defined as manufacturing to tolerances that are better than one part in 105, abound and can be found in various semiconductor processes (e.g., lithography, wafer probing, inspection), co-ordinate measuring machines, precision metrology systems (e.g., scanning probe microscopy), and robot/machine tools to carry out micro-assembly (e.g., micro-electro-mechanical systems) and delicate short-wavelength laser processes. Precision Motion Control (second edition) focuses on enabling technologies for precision engineering - issues of direct importance to be addressed in the overall system design and realization: precision instrumentation and measurement, geometrical calibration and compensation, and motion control. It is a compilation of the most important results and publications from a major project that develops a state-of-the-art, high-speed, ultra-precision robotic system. The second edition has been extensively edited and rewritten throughout with the following particular areas being expanded or added: • piezoelectric actuators; • fine movement control; • gantry-stage control; • interpolation of quadrature encoder signals; • geometrical error modelling for single-, dual- and general-XY-axis stages. By providing detailed experimental verifications of the material developed, a comprehensive and thorough treatment of the subject matter is provided in a manner that is accessible to a broad base of readers, ranging from academics to practitioners. Praise for the first edition: …a refreshing and much needed addition to the field of precision engineering… well written, readable, and concise yet comprehensive. International Journal of Robust and Nonlinear Control …an excellent single source of essential topics related to precision motion control. Applied Mechanics Reviews Advances in Industrial Control aims to report and encourage the transfer of technology in control engineering. The rapid development of control technology has an impact on all areas of the control discipline. The series offers an opportunity for researchers to present an extended exposition of new work in all aspects of industrial control.
650 0 _aEngineering.
650 0 _aVibration.
650 0 _aMachinery.
650 0 _aElectronics.
650 0 _aNanotechnology.
650 1 4 _aEngineering.
650 2 4 _aControl Engineering.
650 2 4 _aNanotechnology.
650 2 4 _aManufacturing, Machines, Tools.
650 2 4 _aAutomation and Robotics.
650 2 4 _aVibration, Dynamical Systems, Control.
650 2 4 _aElectronics and Microelectronics, Instrumentation.
700 1 _aHeng, Lee Tong.
_eauthor.
700 1 _aSunan, Huang.
_eauthor.
710 2 _aSpringerLink (Online service)
773 0 _tSpringer eBooks
776 0 8 _iPrinted edition:
_z9781848000209
830 0 _aAdvances in Industrial Control,
_x1430-9491
856 4 0 _uhttp://dx.doi.org/10.1007/978-1-84800-021-6
912 _aZDB-2-ENG
942 _cEB
999 _c2322
_d2322