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1.
Fundamentals of microfabrication: the science of miniaturization

by Madou, Marc J.

Material type: Text Text; Format: print Language: English Publisher: Boca raton : Crc press, 2002Availability: Items available for loan: Call number: 621.38152 MAD/F (1). Items available for reference: Not for loanCall number: 621.38152 MAD/F (1).

2.
Fundamentals of microfabrication:the science of miniaturization

by Madou Marc J.

Edition: 2ndMaterial type: Text Text; Format: print Language: English Publisher: Boca raton : Crc press, 2002Availability: Items available for loan: Call number: 621.38152 MAD/F (1).


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