Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set [electronic resource] / by Marc J. Madou.Material type: TextLanguage: English Language: English Publisher: Boca Raton, FL : CRC Press, Copyright date: ©2010Edition: Third editionDescription: 1 online resource (1992 pages) : 2192 illustrations, text file, PDFContent type: text Media type: computer Carrier type: online resourceISBN: 9781482274660Subject(s): TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS | TECHNOLOGY & ENGINEERING / Material Science | From Traditional Manufacturing to Nanotechnology | Miniaturization Application | Pattern Transfer with Additive Techniques | Pattern Transfer with Subtractive Techniques | Scaling Laws, Actuators, and Power and Brains in Miniature Devices | Microelectromechanical systems | Microfluidics | Nanoelectromechanical systems | Solid-state physicsGenre/Form: Electronic books. Additional physical formats: Print version: : No titleOnline resources: Click here to view. Also available in print format.
Includes bibliographical references and index.
Volume I--Introduction--Historical Note: The Ascent of Silicon, MEMS, and NEMS -- Crystallography--Quantum Mechanics and the Band Theory of Solids--Silicon Single Crystal Is Still King--Photonics--Fluidics--Electrochemical and Optical Analytical Techniques --Index--Volume II--Part I: Lithography--Introduction to Part I --Photolithography --Next-Generation Lithographies and Lithography Research -- Part II: Pattern Transfer with Subtractive Techniques--Introduction to Part II --Dry Etching --Wet Chemical Etching and Wet Bulk MicromachiningPools as Tools --Thermal Energy-Based Removing --MechanicalEnergy-Based Removing -- Part III: Pattern Transfer with Additive Techniques--Introduction to Part III--Physical and Chemical Vapor DepositionThin Film Properties and Surface Micromachining--Chemical, Photochemical, and Electrochemical Forming Techniques --Thermal Energy-Based Forming TechniquesThermoforming --10 --Micromolding TechniquesLIGA --Index -- Volume III--Part I: From Traditional Manufacturing to Nanotechnology--Introduction to Part I--Nonlithography-Based (Traditional) and Lithography-Based (Nontraditional) Manufacturing Compared--Nature as an Engineering Guide: Biomimetics--Nanotechnology: Top-Down and Bottom-Up Manufacturing Approaches Compared--Packaging, Assembly, and Self-Assembly--Selected Materials and Processes for MEMS and NEMS--6 --Metrology and MEMS/NEMS Modeling 285 -- Part II: Scaling Laws, Actuators, and Power and Brains in Miniature Devices--Introduction to Part II--Scaling Laws--Actuators--Power and Brains in Miniature Devices -- Part III: Miniaturization Application--Introduction to Part III--MEMS and NEMS Applications--Index
Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options.The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work.
Also available in print format.