Measurement technology for micro-nanometer devices / Wendong Zhang ...[et.al.]

By: Zhang, WendongContributor(s): Zhang, Wendong | Chou, Xiujian | Shi, Tielin | Ma, Zongmin | Bao, Haifei | Chen, Jing | Chen, Liguo | Li, Dachao | Xue, ChenyangMaterial type: TextTextLanguage: English Publisher: Singapore : John Wiley & Sons, 2017Description: xii, 329 pISBN: 9781118717967Subject(s): Microtechnology -- Measurement | Nanotechnology -- Measurement | Microelectromechanical devices -- Testing | Physical measurementsDDC classification: 681.2
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