Nanofabrication : principles to laboratory practice / Andrew Sarangan

By: Sarangan, AndrewMaterial type: TextTextLanguage: English Series: Optical sciences and applications of light /edited by James C. WyantPublisher: Boca Raton : CRC Press, 2017Description: xv, 299 pISBN: 9781498725576Subject(s): Nanolithography | Nanostructured materials -- Design and construction | Semiconductors -- Etching | Nanoelectronics -- ExperimentsDDC classification: 621.381531
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621.381531 SAR/A (Browse shelf) Available 82677

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