Dynamics of Microelectromechanical Systems [electronic resource] / by Nicolae Lobontiu.Material type: TextLanguage: English Series: Microsystems: 17Publisher: Boston, MA : Springer US, 2007Description: online resourceContent type: text Media type: computer Carrier type: online resourceISBN: 9780387681955Subject(s): Engineering | Computer aided design | Mechanical engineering | Electronics | Systems engineering | Nanotechnology | Engineering | Electronics and Microelectronics, Instrumentation | Nanotechnology | Circuits and Systems | Computer-Aided Engineering (CAD, CAE) and Design | Mechanical EngineeringAdditional physical formats: Printed edition:: No titleDDC classification: 621.381 LOC classification: TK7800-8360TK7874-7874.9Online resources: Click here to access online
Microcantilevers and Microbridges: Bending and Torsion Resonant Frequencies -- Micromechanical Systems: Modal Analysis -- Energy Losses in MEMS and Equivalent Viscous Damping -- Frequency and Time Response of MEMS.
This work presents a systematic view of the dynamics of MEMS (microelectromechanical systems), microstructures, and their responses. The focus is on the mecahnical/structural micro domain and the compliant nature of mechanical transmission. Features of this work include: An in-depth treatment of problems that involve reliable modeling, analysis and design, Analytical models with correct dependences on service dimensions, Cantilever based systems for nanofabrication researchers and designers, and Dynamics of complex spring and beam microsystems. Although not designed for a specific course, this material could be used as a text at the upper-undergraduate/graduate level, and, as such, it contains numerous fully-solved examples as well as many end-of-the-chapter proposed problems. This is a follow up to the book, Mechanics of Microelectromechanical Systems, by Lobontiu and Garcia (Springer 2004), but the material in this new book is self-contained. Dynamics of Microelectromechanical Systems is a timely text and reference for microstructural engineers, microengineers, and MEMS specialists.