Fundamental principles of engineering nanometrology

By: Leach, Richard KMaterial type: TextTextLanguage: English Series: Micro & nano technologies seriesPublisher: Amsterdam : Elsevier, 2010Description: 321ISBN: 9780080964546Subject(s): Nanotechnology | Metrology | MicrotechnologyDDC classification: 620.50287
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620.50287 LEA/F (Browse shelf) Available 59334

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