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1.
MEMS Vibratory Gyroscopes [electronic resource] : Structural Approaches to Improve Robustness / by Cenk Acar, Andrei Shkel.

by Acar, Cenk [author.] | Shkel, Andrei [author.] | SpringerLink (Online service).

Source: Springer eBooksMaterial type: Text Text; Format: electronic available online remote; Literary form: Not fiction Language: English Publisher: Boston, MA : Springer US, 2009Online access: Click here to access online Availability: No items available :

2.
RF MEMS Switches and Integrated Switching Circuits [electronic resource] : Design, Fabrication, and Test / by Ai-Qun Liu.

by Liu, Ai-Qun [author.] | SpringerLink (Online service).

Source: Springer eBooksMaterial type: Text Text; Format: electronic available online remote; Literary form: Not fiction Language: English Publisher: Boston, MA : Springer US : Imprint: Springer, 2010Online access: Click here to access online Availability: No items available :

3.
BioNanoFluidic MEMS [electronic resource] / edited by Peter J. Hesketh.

by Hesketh, Peter J [editor.] | SpringerLink (Online service).

Source: Springer eBooksMaterial type: Text Text; Format: electronic available online remote; Literary form: Not fiction Language: English Publisher: Boston, MA : Springer US, 2008Online access: Click here to access online Availability: No items available :

4.
MEMS Materials and Processes Handbook [electronic resource] / edited by Reza Ghodssi, Pinyen Lin.

by Ghodssi, Reza [editor.] | Lin, Pinyen [editor.] | SpringerLink (Online service).

Source: Springer eBooksMaterial type: Text Text; Format: electronic available online remote; Literary form: Not fiction Language: English Publisher: Boston, MA : Springer US : Imprint: Springer, 2011Other title: The Handbook MEMs Materials and Processes offers a much more detailed treatment than the book by Leondes which is more general in its coverage and certainly less applied.Online access: Click here to access online Availability: No items available :

5.
Photonic Microsystems [electronic resource] : Micro and Nanotechnology Applied to Optical Devices and Systems / by Olav Solgaard.

by Solgaard, Olav [author.] | SpringerLink (Online service).

Source: Springer eBooksMaterial type: Text Text; Format: electronic available online remote; Literary form: Not fiction Language: English Publisher: Boston, MA : Springer US, 2009Online access: Click here to access online Availability: No items available :

6.
Multi-Wafer Rotating MEMS Machines [electronic resource] : Turbines, Generators, and Engines / edited by Jeffrey Lang.

by Lang, Jeffrey [editor.] | SpringerLink (Online service).

Source: Springer eBooksMaterial type: Text Text; Format: electronic available online remote; Literary form: Not fiction Language: English Publisher: Boston, MA : Springer US : Imprint: Springer, 2010Online access: Click here to access online Availability: No items available :

7.
MEMS Reliability [electronic resource] / by Allyson L. Hartzell, Mark G. da Silva, Herbert R. Shea.

by Hartzell, Allyson L [author.] | da Silva, Mark G [author.] | Shea, Herbert R [author.] | SpringerLink (Online service).

Source: Springer eBooksMaterial type: Text Text; Format: electronic available online remote; Literary form: Not fiction Language: English Publisher: Boston, MA : Springer US : Imprint: Springer, 2011Online access: Click here to access online Availability: No items available :

8.
Radioisotope Thin-Film Powered Microsystems [electronic resource] / by Rajesh Duggirala, Amit Lal, Shankar Radhakrishnan.

by Duggirala, Rajesh [author.] | Lal, Amit [author.] | Radhakrishnan, Shankar [author.] | SpringerLink (Online service).

Source: Springer eBooksMaterial type: Text Text; Format: electronic available online remote; Literary form: Not fiction Language: English Publisher: New York, NY : Springer New York, 2010Online access: Click here to access online Availability: No items available :

9.
Silicon Carbide Microsystems for Harsh Environments [electronic resource] / by Muthu B.J. Wijesundara, Robert Azevedo.

by Wijesundara, Muthu B.J [author.] | Azevedo, Robert [author.] | SpringerLink (Online service).

Source: Springer eBooksMaterial type: Text Text; Format: electronic available online remote; Literary form: Not fiction Language: English Publisher: New York, NY : Springer New York, 2011Online access: Click here to access online Availability: No items available :


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